Compensation of Hysteresis on Piezoelectric Actuators Based on Tripartite PI Model
Piezoelectric ceramic actuators have been widely used in nanopositioning applications owing to their fast response, high stiffness, and ability to generate large forces. However, the existence of nonlinearities such as hysteresis can greatly deteriorate the accuracy of the manipulation, even causing...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2018-01-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | http://www.mdpi.com/2072-666X/9/2/44 |