COMPARISON OF PROPERTIES OF TiN/TiCN AND PLASMA NITRIDING/TiCN FILMS DEPOSITED ON THE TOOL STEEL BY PULSED DC- PACVD
In this work, TiN/TiCN & PN/TiCN multilayer films were deposited by plasma- assisted chemical vapour deposition (PACVD). Plasma nitriding (PN) and TiN intermediate layer prior to coating leads to appropriate hardness gradient and it can greatly improve the mechanical properties of the coating. T...
| Main Authors: | , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
Iran University of Science & Technology
2015-06-01
|
| Series: | Iranian Journal of Materials Science and Engineering |
| Subjects: | |
| Online Access: | http://ijmse.iust.ac.ir/browse.php?a_code=A-10-127-85&slc_lang=en&sid=1 |