Etching-assisted femtosecond laser modification of hard materials

Etching-assisted femtosecond laser modification of hard materials

With high hardness, high thermal and chemical stability and excellent optical performance, hard materials exhibit great potential applications in various fields, especially in harsh conditions. Femtosecond laser ablation has the capability to fabricate three-dimensional micro/nanostructures in hard...

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Bibliographic Details
Main Authors: Liu Xue-Qing, Bai Ben-Feng, Chen Qi-Dai, Sun Hong-Bo
Format: Article
Language:English
Published: Institue of Optics and Electronics, Chinese Academy of Sciences 2019-09-01
Series:Opto-Electronic Advances
Subjects:
femtosecond laser
hard materials
wet etching
dry etching
Online Access:http://www.oejournal.org/article/doi/10.29026/oea.2019.190021

Internet

http://www.oejournal.org/article/doi/10.29026/oea.2019.190021

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