Towards Improved Humidity Sensing Nanomaterials via Combined Electron and NH<sub>3</sub> Treatment of Carbon-Rich FEBID Deposits

Towards Improved Humidity Sensing Nanomaterials via Combined Electron and NH<sub>3</sub> Treatment of Carbon-Rich FEBID Deposits

Focused Electron Beam Induced Deposition (FEBID) is a unique tool to produce nanoscale materials. The resulting deposits can be used, for instance, as humidity or strain sensors. The humidity sensing concept relies on the fact that FEBID using organometallic precursors often yields deposits which co...

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Bibliographic Details
Main Authors: Hannah Boeckers, Petra Swiderek, Markus Rohdenburg
Format: Article
Language:English
Published: MDPI AG 2022-12-01
Series:Nanomaterials
Subjects:
focused electron beam induced deposition
carbonaceous nanomaterials
humidity sensing
nitrogen incorporation
ammonia
Online Access:https://www.mdpi.com/2079-4991/12/24/4455

Internet

https://www.mdpi.com/2079-4991/12/24/4455

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