Thickness measurement of multilayer film stack in perovskite solar cell using spectroscopic ellipsometry
The rapid surge in perovskite solar cell efficiency has necessitated the development of viable metrology techniques during device integration, paving the way for commercialization. Ellipsometry is considered the most appropriate technique for fast and accurate thickness measurement for large scale p...
Main Authors: | , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2019-12-01
|
Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/1.5125686 |