Fabrication of Glass Diaphragm Based Fiber-Optic Microphone for Sensitive Detection of Airborne and Waterborne Sounds
A glass-diaphragm microphone was developed based on fiber-optic Fabry-Perot (FP) interferometry. The glass diaphragm was shaped into a wheel-like structure on a 150-μm-thick glass sheet by laser cutting, which consists of a glass disc connected to an outer glass ring by four identical glass beams. S...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-03-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/22/6/2218 |