Fabrication of Glass Diaphragm Based Fiber-Optic Microphone for Sensitive Detection of Airborne and Waterborne Sounds

A glass-diaphragm microphone was developed based on fiber-optic Fabry-Perot (FP) interferometry. The glass diaphragm was shaped into a wheel-like structure on a 150-μm-thick glass sheet by laser cutting, which consists of a glass disc connected to an outer glass ring by four identical glass beams. S...

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Main Authors: Gaomi Wu, Xinyu Hu, Xin Liu, Zhifei Dong, Yan Yue, Chen Cai, Zhi-mei Qi
Format: Article
Language:English
Published: MDPI AG 2022-03-01
Series:Sensors
Subjects:
Online Access:https://www.mdpi.com/1424-8220/22/6/2218
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author Gaomi Wu
Xinyu Hu
Xin Liu
Zhifei Dong
Yan Yue
Chen Cai
Zhi-mei Qi
author_facet Gaomi Wu
Xinyu Hu
Xin Liu
Zhifei Dong
Yan Yue
Chen Cai
Zhi-mei Qi
author_sort Gaomi Wu
collection DOAJ
description A glass-diaphragm microphone was developed based on fiber-optic Fabry-Perot (FP) interferometry. The glass diaphragm was shaped into a wheel-like structure on a 150-μm-thick glass sheet by laser cutting, which consists of a glass disc connected to an outer glass ring by four identical glass beams. Such a structural diaphragm offers the microphone an open air chamber that reduces air damping and increases sensitivity and results in a cardioid direction pattern for the microphone response. The prepared microphone operates at 1550 nm wavelength, showing high stability in a range of temperature from 10 to 40 °C. The microphone has a resonance peak at 1152 Hz with a quality factor of 21, and its 3-dB cut-off frequency is 32 Hz. At normal incidence of 500 Hz sound, the pressure sensitivity of the microphone is 755 mV/Pa and the corresponding minimum detectable pressure is 251 μPa/Hz<sup>1/2</sup>. In addition to the above characteristics of the microphone in air, a preliminary investigation reveals that the microphone can also work stably under water for a long time due to the combination of the open-chamber and fiber-optic structures, and it has a large signal-to-noise ratio in response to waterborne sounds. The microphone prepared in this work is simple, inexpensive, and electromagnetically robust, showing great potential for low-frequency acoustic detection in air and under water.
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spelling doaj.art-e643428823024254aed5e26223b9338a2023-11-30T22:17:51ZengMDPI AGSensors1424-82202022-03-01226221810.3390/s22062218Fabrication of Glass Diaphragm Based Fiber-Optic Microphone for Sensitive Detection of Airborne and Waterborne SoundsGaomi Wu0Xinyu Hu1Xin Liu2Zhifei Dong3Yan Yue4Chen Cai5Zhi-mei Qi6Aerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaAerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaAerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaAerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaAerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaAerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaAerospace Information Research Institute, Chinese Academy of Sciences, Beijing 100190, ChinaA glass-diaphragm microphone was developed based on fiber-optic Fabry-Perot (FP) interferometry. The glass diaphragm was shaped into a wheel-like structure on a 150-μm-thick glass sheet by laser cutting, which consists of a glass disc connected to an outer glass ring by four identical glass beams. Such a structural diaphragm offers the microphone an open air chamber that reduces air damping and increases sensitivity and results in a cardioid direction pattern for the microphone response. The prepared microphone operates at 1550 nm wavelength, showing high stability in a range of temperature from 10 to 40 °C. The microphone has a resonance peak at 1152 Hz with a quality factor of 21, and its 3-dB cut-off frequency is 32 Hz. At normal incidence of 500 Hz sound, the pressure sensitivity of the microphone is 755 mV/Pa and the corresponding minimum detectable pressure is 251 μPa/Hz<sup>1/2</sup>. In addition to the above characteristics of the microphone in air, a preliminary investigation reveals that the microphone can also work stably under water for a long time due to the combination of the open-chamber and fiber-optic structures, and it has a large signal-to-noise ratio in response to waterborne sounds. The microphone prepared in this work is simple, inexpensive, and electromagnetically robust, showing great potential for low-frequency acoustic detection in air and under water.https://www.mdpi.com/1424-8220/22/6/2218fiber-optic microphonewheel-like glass diaphragmhigh sensitivitygood thermal stabilityunderwater sound detection
spellingShingle Gaomi Wu
Xinyu Hu
Xin Liu
Zhifei Dong
Yan Yue
Chen Cai
Zhi-mei Qi
Fabrication of Glass Diaphragm Based Fiber-Optic Microphone for Sensitive Detection of Airborne and Waterborne Sounds
Sensors
fiber-optic microphone
wheel-like glass diaphragm
high sensitivity
good thermal stability
underwater sound detection
title Fabrication of Glass Diaphragm Based Fiber-Optic Microphone for Sensitive Detection of Airborne and Waterborne Sounds
title_full Fabrication of Glass Diaphragm Based Fiber-Optic Microphone for Sensitive Detection of Airborne and Waterborne Sounds
title_fullStr Fabrication of Glass Diaphragm Based Fiber-Optic Microphone for Sensitive Detection of Airborne and Waterborne Sounds
title_full_unstemmed Fabrication of Glass Diaphragm Based Fiber-Optic Microphone for Sensitive Detection of Airborne and Waterborne Sounds
title_short Fabrication of Glass Diaphragm Based Fiber-Optic Microphone for Sensitive Detection of Airborne and Waterborne Sounds
title_sort fabrication of glass diaphragm based fiber optic microphone for sensitive detection of airborne and waterborne sounds
topic fiber-optic microphone
wheel-like glass diaphragm
high sensitivity
good thermal stability
underwater sound detection
url https://www.mdpi.com/1424-8220/22/6/2218
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