Ozone Sensing by In<sub>2</sub>O<sub>3</sub> Films Modified with Rh: Dimension Effect
We considered the effect of coverage of the surface of In<sub>2</sub>O<sub>3</sub> films with rhodium on the sensitivity of their electrophysical properties to ozone (1 ppm). The surface coverage with rhodium varied in the range of 0–0.1 ML. The In<sub>2</sub>O<...
| Main Authors: | , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2021-03-01
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| Series: | Sensors |
| Subjects: | |
| Online Access: | https://www.mdpi.com/1424-8220/21/5/1886 |