Optical Characterization of Industrial Slurries
In this work we focus on the characterization of micro- and nano-powders typically adopted for chemical mechanical polishing, extensively used whenever the global and local planarization of surfaces is required as in nanoelectronic fabs. We present an innovative method for the accurate characterizat...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
Hosokawa Powder Technology Foundation
2015-09-01
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| Series: | KONA Powder and Particle Journal |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/kona/33/0/33_2016016/_html/-char/en |