Downsizing Effects on Micro and Nano Comb Drives
Downscaling has been a focal task of Electronics and Electromechanics in the last few decades, and a great engine for technological progress as well. Nevertheless, a scaling operation affects device physics, functioning and performance. The present paper investigates about the impact of scaling on a...
| Main Authors: | , , , , |
|---|---|
| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-02-01
|
| Series: | Actuators |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-0825/11/3/71 |