Direct growth of monolayer MoS2 on nanostructured silicon waveguides
We report for the first time the direct growth of molybdenum disulfide (MoS2) monolayers on nanostructured silicon-on-insulator waveguides. Our results indicate the possibility of utilizing the Chemical Vapour Deposition (CVD) on nanostructured photonic devices in a scalable process. Direct growth o...
Main Authors: | , , , , , , , , , , , , , , , , , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
De Gruyter
2022-08-01
|
Series: | Nanophotonics |
Subjects: | |
Online Access: | https://doi.org/10.1515/nanoph-2022-0235 |