Direct growth of monolayer MoS2 on nanostructured silicon waveguides

We report for the first time the direct growth of molybdenum disulfide (MoS2) monolayers on nanostructured silicon-on-insulator waveguides. Our results indicate the possibility of utilizing the Chemical Vapour Deposition (CVD) on nanostructured photonic devices in a scalable process. Direct growth o...

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Bibliographic Details
Main Authors: Kuppadakkath Athira, Najafidehaghani Emad, Gan Ziyang, Tuniz Alessandro, Ngo Gia Quyet, Knopf Heiko, Löchner Franz J. F., Abtahi Fatemeh, Bucher Tobias, Shradha Sai, Käsebier Thomas, Palomba Stefano, Felde Nadja, Paul Pallabi, Ullsperger Tobias, Schröder Sven, Szeghalmi Adriana, Pertsch Thomas, Staude Isabelle, Zeitner Uwe, George Antony, Turchanin Andrey, Eilenberger Falk
Format: Article
Language:English
Published: De Gruyter 2022-08-01
Series:Nanophotonics
Subjects:
Online Access:https://doi.org/10.1515/nanoph-2022-0235