Direct growth of monolayer MoS2 on nanostructured silicon waveguides
We report for the first time the direct growth of molybdenum disulfide (MoS2) monolayers on nanostructured silicon-on-insulator waveguides. Our results indicate the possibility of utilizing the Chemical Vapour Deposition (CVD) on nanostructured photonic devices in a scalable process. Direct growth o...
Main Authors: | Kuppadakkath Athira, Najafidehaghani Emad, Gan Ziyang, Tuniz Alessandro, Ngo Gia Quyet, Knopf Heiko, Löchner Franz J. F., Abtahi Fatemeh, Bucher Tobias, Shradha Sai, Käsebier Thomas, Palomba Stefano, Felde Nadja, Paul Pallabi, Ullsperger Tobias, Schröder Sven, Szeghalmi Adriana, Pertsch Thomas, Staude Isabelle, Zeitner Uwe, George Antony, Turchanin Andrey, Eilenberger Falk |
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Format: | Article |
Language: | English |
Published: |
De Gruyter
2022-08-01
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Series: | Nanophotonics |
Subjects: | |
Online Access: | https://doi.org/10.1515/nanoph-2022-0235 |
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