Dual-Axis MEMS Resonant Scanner Using 128<sup>∘</sup>Y Lithium Niobate Thin-Film
The micro-electro-mechanical systems (MEMS) resonant scanners are in great demand for numerous light scanning applications. Recently, the development of LiDAR in micro-robotics and mobile devices has led to the requirement of ultra-small systems with low driving voltage, low power, compact size and...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-04-01
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| Series: | Acoustics |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2624-599X/4/2/19 |