3D Imaging and Quantitative Subsurface Dielectric Constant Measurement Using Peak Force Kelvin Probe Force Microscopy

3D Imaging and Quantitative Subsurface Dielectric Constant Measurement Using Peak Force Kelvin Probe Force Microscopy

Abstract Noninvasive and depth‐sensitive measurements of dielectric properties are becoming of great interest in advanced and complex nanostructured architectures. Here, a straightforward parallel approach applicable in peak force Kelvin probe force microscopy for a 3D measurement of dielectric cons...

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Bibliographic Details
Main Authors: Khaled Kaja, Ammar Assoum, Peter De Wolf, François Piquemal, Antonio Nehmee, Adnan Naja, Taha Beyrouthy, Mustapha Jouiad
Format: Article
Language:English
Published: Wiley-VCH 2024-01-01
Series:Advanced Materials Interfaces
Subjects:
AFM
data clustering
dielectric constant
KPFM
nano tomography
peak force tapping
Online Access:https://doi.org/10.1002/admi.202300503

Internet

https://doi.org/10.1002/admi.202300503

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