Ion-beam assisted sputtering of titanium nitride thin films

Ion-beam assisted sputtering of titanium nitride thin films

Abstract Titanium nitride is a material of interest for many superconducting devices such as nanowire microwave resonators and photon detectors. Thus, controlling the growth of TiN thin films with desirable properties is of high importance. This work aims to explore effects in ion beam-assisted sput...

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Bibliographic Details
Main Authors: Timothy Draher, Tomas Polakovic, Juliang Li, Yi Li, Ulrich Welp, Jidong Samuel Jiang, John Pearson, Whitney Armstrong, Zein-Eddine Meziani, Clarence Chang, Wai-Kwong Kwok, Zhili Xiao, Valentine Novosad
Format: Article
Language:English
Published: Nature Portfolio 2023-04-01
Series:Scientific Reports
Online Access:https://doi.org/10.1038/s41598-023-31549-0

Internet

https://doi.org/10.1038/s41598-023-31549-0

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