Carré Phase Shifting Algorithm for Wavelength Scanning Interferometry
Wavelength scanning interferometry is an interferometric technique for measuring surface topography without the well-known 2π phase ambiguity limitation. The measurement accuracy and resolution of this technique depends, among other factors, on the algorithm used to evaluate its sinusoidal interfere...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2022-02-01
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| Series: | Machines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2075-1702/10/2/116 |