Non-Inchworm Electrostatic Cooperative Micro-Stepper-Actuator Systems with Long Stroke

Non-Inchworm Electrostatic Cooperative Micro-Stepper-Actuator Systems with Long Stroke

In this paper, we present different microelectromechanical systems based on electrostatic actuators, and demonstrate their capacity to achieve large and stepwise displacements using a cooperative function of the actuators themselves. To explore this, we introduced micro-stepper actuators to our expe...

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Bibliographic Details
Main Authors: Lisa Schmitt, Peter Conrad, Alexander Kopp, Christoph Ament, Martin Hoffmann
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Actuators
Subjects:
cooperative electrostatic actuators
long stroke
large displacement
stepper actuators
spring-less actuators
EWOD
Online Access:https://www.mdpi.com/2076-0825/12/4/150

Internet

https://www.mdpi.com/2076-0825/12/4/150

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