Progress of optomechanical micro/nano sensors: a review
Optomechanical sensing based on the coupling between mechanical motions and optical resonances has attracted huge interest in sensor applications due to its small footprint, high sensitivity, low detection limit, and electromagnetic immunity. Optomechanical sensors that detect from mechanical motion...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Taylor & Francis Group
2021-01-01
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| Series: | International Journal of Optomechatronics |
| Subjects: | |
| Online Access: | http://dx.doi.org/10.1080/15599612.2021.1986612 |