Multi-Channel MEMS-FAIMS Gas Sensor for VOCs Detection
Aimed at the problems of a large equipment size, long time and high price of environmental VOC gas detection, the FAIMS-VOC gas sensor was designed and prepared according to the principle that the ionization energy of the common VOC gas is less than 10.6 eV. The sensor is small in size, fast in dete...
| Main Authors: | , , , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
MDPI AG
2023-03-01
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| Series: | Micromachines |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2072-666X/14/3/608 |