A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors

A Five-Hole Pressure Probe Based on Integrated MEMS Fiber-Optic Fabry-Perot Sensors

The five-hole pressure probe based on Micro-Electro-Mechanical Systems (MEMS) technology is designed to meet the needs of engine inlet pressure measurement. The probe, including a pressure-sensitive detection unit and a five-hole probe encapsulation structure, combines the advantages of a five-hole...

Full description

Bibliographic Details
Main Authors: Yumiao Song, Shuanghui Ma, Jichun Zhao, Jia Liu, Jingyi Wang, Yongjun Cui
Format: Article
Language:English
Published: MDPI AG 2024-04-01
Series:Micromachines
Subjects:
five-hole probe
pressure measurement
fiber-optic Fabry–Perot
MEMS
Online Access:https://www.mdpi.com/2072-666X/15/4/554

Internet

https://www.mdpi.com/2072-666X/15/4/554

Similar Items