Simulation-Based Analysis on Operational Control of Batch Processors in Wafer Fabrication
In semiconductor wafer fabrication (wafer fab), wafers go through hundreds of process steps on a variety of processing machines for electrical circuit building operations. One of the special features in the wafer fabs is that there exist batch processors (BPs) where several wafer lots are processed...
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| Format: | Article |
| Language: | English |
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MDPI AG
2020-08-01
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| Series: | Applied Sciences |
| Subjects: | |
| Online Access: | https://www.mdpi.com/2076-3417/10/17/5936 |