Development of low-cost heterodyne interferometer with virtual electronic phasemeter
Commercial laser interferometers are conventionally used to measure the positioning error of a long linear stage in multiaxis computer numerical control machine tools. However, commercial laser interferometers are costly and difficult to use. Therefore, a low-cost photodetector-based heterodyne inte...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
SAGE Publishing
2022-05-01
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| Series: | Measurement + Control |
| Online Access: | https://doi.org/10.1177/00202940221095529 |