Rapid synthesis of dielectric tantalum-based oxynitrides
Perovskite-type oxynitride with a general formula of ATa(O,N)3 (A = Sr, Ba) is a class of promising dielectric material due to their very high permittivity. Conventional synthesis routes for these materials always require multiple processing steps, long durations and elevated temperatures. In this s...
Main Authors: | , , , , , |
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פורמט: | Article |
שפה: | English |
יצא לאור: |
Elsevier
2020-02-01
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סדרה: | Materials & Design |
גישה מקוונת: | http://www.sciencedirect.com/science/article/pii/S0264127519308548 |