Rapid synthesis of dielectric tantalum-based oxynitrides

Perovskite-type oxynitride with a general formula of ATa(O,N)3 (A = Sr, Ba) is a class of promising dielectric material due to their very high permittivity. Conventional synthesis routes for these materials always require multiple processing steps, long durations and elevated temperatures. In this s...

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Bibliographic Details
Main Authors: Duan Li, Liang Zeng, Bin Li, Xuejin Yang, Qiuping Yu, Zhongshuai Wu
Format: Article
Language:English
Published: Elsevier 2020-02-01
Series:Materials & Design
Online Access:http://www.sciencedirect.com/science/article/pii/S0264127519308548