Electrochemical Deposition of Pure-Nickel Microstructures with Controllable Size
Pure nickel microstructures have been widely used in MEMS and have great application potential as a sacrificial mandrel for fabricating terahertz micro-cavity components. The performance of MEMS and terahertz micro-cavity components can be significantly improved through the use of high-quality pure...
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-04-01
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Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/13/5/704 |