Electrochemical Deposition of Pure-Nickel Microstructures with Controllable Size
Pure nickel microstructures have been widely used in MEMS and have great application potential as a sacrificial mandrel for fabricating terahertz micro-cavity components. The performance of MEMS and terahertz micro-cavity components can be significantly improved through the use of high-quality pure...
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| Format: | Article |
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MDPI AG
2022-04-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/5/704 |
| _version_ | 1797497811480084480 |
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| author | Xiaolei Bi Lingchao Meng |
| author_facet | Xiaolei Bi Lingchao Meng |
| author_sort | Xiaolei Bi |
| collection | DOAJ |
| description | Pure nickel microstructures have been widely used in MEMS and have great application potential as a sacrificial mandrel for fabricating terahertz micro-cavity components. The performance of MEMS and terahertz micro-cavity components can be significantly improved through the use of high-quality pure nickel microstructures. Up to now, microfabrication techniques, such as laser micromachining, wire electrical-discharge machining, and cold-spray additive manufacturing, have been used to machine various types of such microstructures. However, huge challenges are involved in using these micromachining techniques to fabricate pure-nickel microstructures with controllable size and good dimensional accuracy, surface roughness, and edge radius. In this paper, taking the example of a pure-nickel rectangular mandrel that corresponds to the size of the end face of a 1.7-THz rectangular waveguide cavity, the machining processes for the electrochemical deposition of pure-nickel microstructures with controllable size, high dimensional accuracy, and good surface roughness and edge radius are discussed systematically. This proposed method can be used to manufacture various types of high-quality pure-nickel microstructures. |
| first_indexed | 2024-03-10T03:24:33Z |
| format | Article |
| id | doaj.art-e7a506c434bc4c79938ec7dba0a92330 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T03:24:33Z |
| publishDate | 2022-04-01 |
| publisher | MDPI AG |
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| series | Micromachines |
| spelling | doaj.art-e7a506c434bc4c79938ec7dba0a923302023-11-23T12:11:50ZengMDPI AGMicromachines2072-666X2022-04-0113570410.3390/mi13050704Electrochemical Deposition of Pure-Nickel Microstructures with Controllable SizeXiaolei Bi0Lingchao Meng1School of Mechanical Engineering, Henan Institute of Technology, Xinxiang 453003, ChinaState Key Laboratory of High Performance Complex Manufacturing, Central South University, Changsha 410083, ChinaPure nickel microstructures have been widely used in MEMS and have great application potential as a sacrificial mandrel for fabricating terahertz micro-cavity components. The performance of MEMS and terahertz micro-cavity components can be significantly improved through the use of high-quality pure nickel microstructures. Up to now, microfabrication techniques, such as laser micromachining, wire electrical-discharge machining, and cold-spray additive manufacturing, have been used to machine various types of such microstructures. However, huge challenges are involved in using these micromachining techniques to fabricate pure-nickel microstructures with controllable size and good dimensional accuracy, surface roughness, and edge radius. In this paper, taking the example of a pure-nickel rectangular mandrel that corresponds to the size of the end face of a 1.7-THz rectangular waveguide cavity, the machining processes for the electrochemical deposition of pure-nickel microstructures with controllable size, high dimensional accuracy, and good surface roughness and edge radius are discussed systematically. This proposed method can be used to manufacture various types of high-quality pure-nickel microstructures.https://www.mdpi.com/2072-666X/13/5/704electrochemical depositionpure nickelrectangular mandrelterahertz micro-cavity componentscontrollable size |
| spellingShingle | Xiaolei Bi Lingchao Meng Electrochemical Deposition of Pure-Nickel Microstructures with Controllable Size Micromachines electrochemical deposition pure nickel rectangular mandrel terahertz micro-cavity components controllable size |
| title | Electrochemical Deposition of Pure-Nickel Microstructures with Controllable Size |
| title_full | Electrochemical Deposition of Pure-Nickel Microstructures with Controllable Size |
| title_fullStr | Electrochemical Deposition of Pure-Nickel Microstructures with Controllable Size |
| title_full_unstemmed | Electrochemical Deposition of Pure-Nickel Microstructures with Controllable Size |
| title_short | Electrochemical Deposition of Pure-Nickel Microstructures with Controllable Size |
| title_sort | electrochemical deposition of pure nickel microstructures with controllable size |
| topic | electrochemical deposition pure nickel rectangular mandrel terahertz micro-cavity components controllable size |
| url | https://www.mdpi.com/2072-666X/13/5/704 |
| work_keys_str_mv | AT xiaoleibi electrochemicaldepositionofpurenickelmicrostructureswithcontrollablesize AT lingchaomeng electrochemicaldepositionofpurenickelmicrostructureswithcontrollablesize |