Operando SXRD study of the structure and growth process of Cu2S ultra-thin films
Abstract Electrochemical Atomic Layer Deposition (E-ALD) technique has demonstrated to be a suitable process for growing compound semiconductors, by alternating the under-potential deposition (UPD) of the metallic element with the UPD of the non-metallic element. The cycle can be repeated several ti...
Main Authors: | , , , , , , , , , |
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Format: | Article |
Language: | English |
Published: |
Nature Portfolio
2017-05-01
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Series: | Scientific Reports |
Online Access: | https://doi.org/10.1038/s41598-017-01717-0 |