Flexible radio-frequency micro electro-mechanical switch towards the applications of satellite communications

Flexible radio-frequency micro electro-mechanical switch towards the applications of satellite communications

Abstract This paper presents a flexible radio-frequency microelectromechanical system (RF MEMS) switch integrated on cyclo-olefin polymer (COP) substrate using a modified surface MEMS processing technology, which could be used in the 17–19 GHz frequency band of satellite communication. Through syste...

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Bibliographic Details
Main Authors: Yingli Shi, Chao Zhou, Zibo Cao, Yurong He, Jingwen Guo, Chunxin Li, Qianhong Wu, Kui Liang, Yanzhao Li, Yuan Lin
Format: Article
Language:English
Published: Nature Portfolio 2022-09-01
Series:npj Flexible Electronics
Online Access:https://doi.org/10.1038/s41528-022-00214-3

Internet

https://doi.org/10.1038/s41528-022-00214-3

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