Effect of tool geometry on ultraprecision machining of soft-brittle materials: a comprehensive review

Brittle materials are widely used for producing important components in the industry of optics, optoelectronics, and semiconductors. Ultraprecision machining of brittle materials with high surface quality and surface integrity helps improve the functional performance and lifespan of the components....

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Bibliographic Details
Main Authors: Weihai Huang, Jiwang Yan
Format: Article
Language:English
Published: IOP Publishing 2023-01-01
Series:International Journal of Extreme Manufacturing
Subjects:
Online Access:https://doi.org/10.1088/2631-7990/acab3f