Effect of tool geometry on ultraprecision machining of soft-brittle materials: a comprehensive review
Brittle materials are widely used for producing important components in the industry of optics, optoelectronics, and semiconductors. Ultraprecision machining of brittle materials with high surface quality and surface integrity helps improve the functional performance and lifespan of the components....
Main Authors: | , |
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Format: | Article |
Language: | English |
Published: |
IOP Publishing
2023-01-01
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Series: | International Journal of Extreme Manufacturing |
Subjects: | |
Online Access: | https://doi.org/10.1088/2631-7990/acab3f |