Influence of Grain Boundary Scattering on the Field-Effect Mobility of Solid-Phase Crystallized Hydrogenated Polycrystalline In<sub>2</sub>O<sub>3</sub> (In<sub>2</sub>O<sub>3</sub>:H)
Hydrogenated polycrystalline In<sub>2</sub>O<sub>3</sub> (In<sub>2</sub>O<sub>3</sub>:H) thin-film transistors (TFTs) fabricated via the low-temperature solid-phase crystallization (SPC) process with a field-effect mobility (<i>μ</i><sub...
Main Authors: | , , , |
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Format: | Article |
Language: | English |
Published: |
MDPI AG
2022-08-01
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Series: | Nanomaterials |
Subjects: | |
Online Access: | https://www.mdpi.com/2079-4991/12/17/2958 |