Fabrication of Large Area Periodic Nanostructures Using Nanosphere Photolithography

Fabrication of Large Area Periodic Nanostructures Using Nanosphere Photolithography

<p>Abstract</p> <p>Large area periodic nanostructures exhibit unique optical and electronic properties and have found many applications, such as photonic band-gap materials, high dense data storage, and photonic devices. We have developed a maskless photolithography method&#821...

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Bibliographic Details
Main Authors: Wu Wei, Dey Dibyendu, Memis Omer, Katsnelson Alex, Mohseni Hooman
Format: Article
Language:English
Published: SpringerOpen 2008-01-01
Series:Nanoscale Research Letters
Subjects:
Microspheres
Photolithography
Nanostructures
Online Access:http://dx.doi.org/10.1007/s11671-008-9164-y

Internet

http://dx.doi.org/10.1007/s11671-008-9164-y

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