Surface Modification and Direct Bonding of Different Materials Irradiated H2O Ion
Reliable joining technologies are essential for fabrication of microstructures such as micro-machines, and particularly technologies that are capable of jointing different types of materials. However, these technologies cannot be used for materials that have different rates of thermal expansion or i...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2008-04-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/2/2/2_2_197/_pdf/-char/en |