Molecular Layer Deposition of Pyrrone Thin Films by Oxidative Polymerization

Molecular Layer Deposition of Pyrrone Thin Films by Oxidative Polymerization

Abstract In this paper, the deposition of pyrrone thin film materials by molecular layer deposition (MLD) is reported for the first time using pyromellitic dianhydride (PMDA) and 3,3'‐diaminobenzidine (DAB) as monomers, and ozone as a promoting precursor. Besides ozone, the effect of water, hyd...

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Bibliographic Details
Main Authors: Saba Ghafourisaleh, Marko Vehkamäki, Anton Vihervaara, Chao Zhang, Mikko J. Heikkilä, Markku Leskelä, Matti Putkonen, Mikko Ritala
Format: Article
Language:English
Published: Wiley-VCH 2023-03-01
Series:Advanced Materials Interfaces
Subjects:
chemical
electrical properties
molecular layer deposition
pyrrone
thermal
Online Access:https://doi.org/10.1002/admi.202202174

Internet

https://doi.org/10.1002/admi.202202174

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