Multimodal microscopy of extended defects in β-Ga2O3 (010) EFG crystals
Beta-phase gallium oxide (β-Ga2O3) has attracted attention in recent years as a potentially low cost, large area substrate and active layer material for high power, high temperature power electronics and sensing devices. However, growth of β-Ga2O3 crystals is complicated by easily activated (100) an...
Main Authors: | , , , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2023-07-01
|
Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/5.0158904 |