Multimodal microscopy of extended defects in β-Ga2O3 (010) EFG crystals

Beta-phase gallium oxide (β-Ga2O3) has attracted attention in recent years as a potentially low cost, large area substrate and active layer material for high power, high temperature power electronics and sensing devices. However, growth of β-Ga2O3 crystals is complicated by easily activated (100) an...

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Bibliographic Details
Main Authors: Drew Haven, Helio Moutinho, John S. Mangum, Harvey Guthrey, David Joyce, Andriy Zakutayev, Nancy M. Haegel
Format: Article
Language:English
Published: AIP Publishing LLC 2023-07-01
Series:AIP Advances
Online Access:http://dx.doi.org/10.1063/5.0158904

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