Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography

Damped Cantilever Microprobes for High-Speed Contact Metrology with 3D Surface Topography

We addressed the coating 5 mm-long cantilever microprobes with a viscoelastic material, which was intended to considerably extend the range of the traverse speed during the measurements of the 3D surface topography by damping contact-induced oscillations. The damping material was composed of epoxy g...

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Bibliographic Details
Main Authors: Michael Fahrbach, Min Xu, Wilson Ombati Nyang’au, Oleg Domanov, Christian H. Schwalb, Zhi Li, Christian Kuhlmann, Uwe Brand, Erwin Peiner
Format: Article
Language:English
Published: MDPI AG 2023-02-01
Series:Sensors
Subjects:
piezoresistive cantilever
tactile surface scanning
high-throughput metrology
contact mode
resonance frequency
quality factor
Online Access:https://www.mdpi.com/1424-8220/23/4/2003

Internet

https://www.mdpi.com/1424-8220/23/4/2003

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