Influence of sublimation surface on mass transport in AlN crystal growth by physical vapor transport process
A series of numerical experiments were performed to investigate the influence of the sublimation surface on mass transport during the aluminum nitride (AlN) growth process. The distribution of Al partial pressure is strongly affected by the cover of the sublimation interface. The morphology of the g...
Main Authors: | , , , , , , |
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Format: | Article |
Language: | English |
Published: |
AIP Publishing LLC
2022-05-01
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Series: | AIP Advances |
Online Access: | http://dx.doi.org/10.1063/5.0090077 |