Observation of particle assisted nano-ring, bump, pit structures on semiconductor substrates by dry laser exposure
We report on the generation of nano-structures on semiconductor substrates through particle assisted dry laser exposure technique. Of particular interest is the formation of nano rings in case of Silicon substrate following exposure with sub nano-second laser pulse at 532 nm wavelength. Usage of suc...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
| Published: |
AIP Publishing LLC
2018-11-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5052053 |