Observation of particle assisted nano-ring, bump, pit structures on semiconductor substrates by dry laser exposure
We report on the generation of nano-structures on semiconductor substrates through particle assisted dry laser exposure technique. Of particular interest is the formation of nano rings in case of Silicon substrate following exposure with sub nano-second laser pulse at 532 nm wavelength. Usage of suc...
| Main Authors: | , , , |
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| Format: | Article |
| Language: | English |
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AIP Publishing LLC
2018-11-01
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| Series: | AIP Advances |
| Online Access: | http://dx.doi.org/10.1063/1.5052053 |
| _version_ | 1811280570519388160 |
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| author | Bijoy Sugathan J. Padma Nilaya V. P. Mahadevan Pillai Dhruba J. Biswas |
| author_facet | Bijoy Sugathan J. Padma Nilaya V. P. Mahadevan Pillai Dhruba J. Biswas |
| author_sort | Bijoy Sugathan |
| collection | DOAJ |
| description | We report on the generation of nano-structures on semiconductor substrates through particle assisted dry laser exposure technique. Of particular interest is the formation of nano rings in case of Silicon substrate following exposure with sub nano-second laser pulse at 532 nm wavelength. Usage of such a laser pulse enabled us to realise a condition wherein the dominating thermo-capillary force allowed the formation of nano rings. With gradual increase in the laser fluence the nano rings gave way to formation of nano bumps and nano pits. In case of GaAs, on the other hand, nano rings could be observed for irradiation at 1064 nm at substantially higher value of fluence, in line with its poor absorption in the substrate. For exposure to 532 nm wavelength, onset of ablation even for low incident fluence precluded the formation of rings or bumps. |
| first_indexed | 2024-04-13T01:17:06Z |
| format | Article |
| id | doaj.art-e963a8fc9aff4558898e1b36fe262a5a |
| institution | Directory Open Access Journal |
| issn | 2158-3226 |
| language | English |
| last_indexed | 2024-04-13T01:17:06Z |
| publishDate | 2018-11-01 |
| publisher | AIP Publishing LLC |
| record_format | Article |
| series | AIP Advances |
| spelling | doaj.art-e963a8fc9aff4558898e1b36fe262a5a2022-12-22T03:08:54ZengAIP Publishing LLCAIP Advances2158-32262018-11-01811115110115110-810.1063/1.5052053006811ADVObservation of particle assisted nano-ring, bump, pit structures on semiconductor substrates by dry laser exposureBijoy Sugathan0J. Padma Nilaya1V. P. Mahadevan Pillai2Dhruba J. Biswas3Laser and Plasma Technology Division, Bhabha Atomic Research Centre, Mumbai 400085, IndiaLaser and Plasma Technology Division, Bhabha Atomic Research Centre, Mumbai 400085, IndiaDept. of Optoelectronics, University of Kerala, Kariavattom, Thiruvananthapuram 695581, IndiaLaser and Plasma Technology Division, Bhabha Atomic Research Centre, Mumbai 400085, IndiaWe report on the generation of nano-structures on semiconductor substrates through particle assisted dry laser exposure technique. Of particular interest is the formation of nano rings in case of Silicon substrate following exposure with sub nano-second laser pulse at 532 nm wavelength. Usage of such a laser pulse enabled us to realise a condition wherein the dominating thermo-capillary force allowed the formation of nano rings. With gradual increase in the laser fluence the nano rings gave way to formation of nano bumps and nano pits. In case of GaAs, on the other hand, nano rings could be observed for irradiation at 1064 nm at substantially higher value of fluence, in line with its poor absorption in the substrate. For exposure to 532 nm wavelength, onset of ablation even for low incident fluence precluded the formation of rings or bumps.http://dx.doi.org/10.1063/1.5052053 |
| spellingShingle | Bijoy Sugathan J. Padma Nilaya V. P. Mahadevan Pillai Dhruba J. Biswas Observation of particle assisted nano-ring, bump, pit structures on semiconductor substrates by dry laser exposure AIP Advances |
| title | Observation of particle assisted nano-ring, bump, pit structures on semiconductor substrates by dry laser exposure |
| title_full | Observation of particle assisted nano-ring, bump, pit structures on semiconductor substrates by dry laser exposure |
| title_fullStr | Observation of particle assisted nano-ring, bump, pit structures on semiconductor substrates by dry laser exposure |
| title_full_unstemmed | Observation of particle assisted nano-ring, bump, pit structures on semiconductor substrates by dry laser exposure |
| title_short | Observation of particle assisted nano-ring, bump, pit structures on semiconductor substrates by dry laser exposure |
| title_sort | observation of particle assisted nano ring bump pit structures on semiconductor substrates by dry laser exposure |
| url | http://dx.doi.org/10.1063/1.5052053 |
| work_keys_str_mv | AT bijoysugathan observationofparticleassistednanoringbumppitstructuresonsemiconductorsubstratesbydrylaserexposure AT jpadmanilaya observationofparticleassistednanoringbumppitstructuresonsemiconductorsubstratesbydrylaserexposure AT vpmahadevanpillai observationofparticleassistednanoringbumppitstructuresonsemiconductorsubstratesbydrylaserexposure AT dhrubajbiswas observationofparticleassistednanoringbumppitstructuresonsemiconductorsubstratesbydrylaserexposure |