An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

An Optical Measuring Transducer for a Micro-Opto-Electro-Mechanical Micro-g Accelerometer Based on the Optical Tunneling Effect

Micro-opto-electro-mechanical (MOEM) accelerometers that can measure small accelerations are attracting growing attention thanks to their considerable advantages—such as high sensitivity and immunity to electromagnetic noise—over their rivals. In this treatise, we analyze 12 schemes of MOEM-accelero...

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Bibliographic Details
Main Authors: Evgenii Barbin, Tamara Nesterenko, Aleksei Koleda, Evgeniy Shesterikov, Ivan Kulinich, Andrey Kokolov
Format: Article
Language:English
Published: MDPI AG 2023-03-01
Series:Micromachines
Subjects:
MOEM-accelerometer
optical measuring transducer
inertial mass
movable and fixed waveguides
optical transmission coefficient
coupling length
Online Access:https://www.mdpi.com/2072-666X/14/4/802

Internet

https://www.mdpi.com/2072-666X/14/4/802

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