CMOS MEMS Design and Fabrication Platform

CMOS MEMS Design and Fabrication Platform

This article mainly describes the technology related to the CMOS MEMS process platform provided by the Taiwan Semiconductor Research Institute (TSRI), including the process flow, design verification, back-end dicing, and packaging of the CMOS MEMS integrated sensing single chip. The front-end CMOS p...

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Bibliographic Details
Main Author: Sheng-Hsiang Tseng
Format: Article
Language:English
Published: Frontiers Media S.A. 2022-04-01
Series:Frontiers in Mechanical Engineering
Subjects:
CMOS MEMS
design platform
accelerometer
post-CMOS
single-chip
Online Access:https://www.frontiersin.org/articles/10.3389/fmech.2022.894484/full

Internet

https://www.frontiersin.org/articles/10.3389/fmech.2022.894484/full

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