Controlled synthesis of periodic arrays of ZnO nanostructures combining e-beam lithography and solution-based processes leveraged by micro X-ray fluorescence spectroscopy
In this work, a comprehensive study on how to combine purely chemical, bottom-up solution-based synthesis with advanced e-beam lithography for the controllable production of ZnO-nanostructure periodic arrays on Si and SiO2 substrates is presented. The study was complemented with micro-X-ray fluoresc...
| Main Authors: | , , , , |
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| Format: | Article |
| Language: | English |
| Published: |
Elsevier
2020-08-01
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| Series: | Micro and Nano Engineering |
| Subjects: | |
| Online Access: | http://www.sciencedirect.com/science/article/pii/S2590007220300186 |