TiNiHf/SiO2/Si shape memory film composites for bi-directional micro actuation

TiNiHf/SiO2/Si shape memory film composites for bi-directional micro actuation

ABSTRACTThe martensitic phase transformation in Ti40.4Ni48Hf11.6 shape memory alloys is leveraged for bi-directional actuation with TiNiHf/SiO2/Si composites. The shape memory properties of magnetron sputtered Ti40.4Ni48Hf11.6 films annealed at 635°C – 5 min are influenced by film thickness and the...

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Bibliographic Details
Main Authors: Sabrina M. Curtis, Marian Sielenkämper, Gowtham Arivanandhan, Duygu Dengiz, Zixiong Li, Justin Jetter, Lisa Hanke, Lars Bumke, Eckhard Quandt, Stephan Wulfinghoff, Manfred Kohl
Format: Article
Language:English
Published: Taylor & Francis Group 2022-04-01
Series:International Journal of Smart and Nano Materials
Subjects:
Bimorph microactuator
NiTiHf
bistable actuator
shape memory alloy
thin films
Online Access:https://www.tandfonline.com/doi/10.1080/19475411.2022.2071352

Internet

https://www.tandfonline.com/doi/10.1080/19475411.2022.2071352

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