TiNiHf/SiO2/Si shape memory film composites for bi-directional micro actuation
ABSTRACTThe martensitic phase transformation in Ti40.4Ni48Hf11.6 shape memory alloys is leveraged for bi-directional actuation with TiNiHf/SiO2/Si composites. The shape memory properties of magnetron sputtered Ti40.4Ni48Hf11.6 films annealed at 635°C – 5 min are influenced by film thickness and the...
| Main Authors: | , , , , , , , , , , |
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| Format: | Article |
| Language: | English |
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Taylor & Francis Group
2022-04-01
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| Series: | International Journal of Smart and Nano Materials |
| Subjects: | |
| Online Access: | https://www.tandfonline.com/doi/10.1080/19475411.2022.2071352 |
| _version_ | 1811168125223174144 |
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| author | Sabrina M. Curtis Marian Sielenkämper Gowtham Arivanandhan Duygu Dengiz Zixiong Li Justin Jetter Lisa Hanke Lars Bumke Eckhard Quandt Stephan Wulfinghoff Manfred Kohl |
| author_facet | Sabrina M. Curtis Marian Sielenkämper Gowtham Arivanandhan Duygu Dengiz Zixiong Li Justin Jetter Lisa Hanke Lars Bumke Eckhard Quandt Stephan Wulfinghoff Manfred Kohl |
| author_sort | Sabrina M. Curtis |
| collection | DOAJ |
| description | ABSTRACTThe martensitic phase transformation in Ti40.4Ni48Hf11.6 shape memory alloys is leveraged for bi-directional actuation with TiNiHf/SiO2/Si composites. The shape memory properties of magnetron sputtered Ti40.4Ni48Hf11.6 films annealed at 635°C – 5 min are influenced by film thickness and the underlying substrate. Decreasing TiNiHf film thickness from 21 μm to 110 nm results in the reduction of all characteristic transformation temperatures until a critical thickness is reached. Particularly, Ti40.4Ni48Hf11.6 thin films as low as 220 nm show transformations above room temperature when deposited on SiO2 buffer layer, which is of great interest in nano-actuation. In comparison, 220 nm films on Si substrates are austenitic at room temperature, and thus not suitable for actuation. Thermal fatigue tests on TiNiHf/SiO2/Si bimorphs demonstrate better functional fatigue characteristics than freestanding films, with an average reduction of 15°C after 125 cycles, with temperature stabilization subsequently. Experimental bi-directional actuation results are promising in the development of bistable actuators within a PMMA/TiNiHf/Si trimorph composite, whereby the additional PMMA layer undergoes a glass transition at 105°C. With the aid of constitutive modeling, a route is elaborated on how bistable actuation can be achieved at micro- to nanoscales by showing favorable thickness combinations of PMMA/TiNiHf/Si composite. |
| first_indexed | 2024-04-10T16:20:48Z |
| format | Article |
| id | doaj.art-e9c68021e442469bae3ec9322970fbdb |
| institution | Directory Open Access Journal |
| issn | 1947-5411 1947-542X |
| language | English |
| last_indexed | 2024-04-10T16:20:48Z |
| publishDate | 2022-04-01 |
| publisher | Taylor & Francis Group |
| record_format | Article |
| series | International Journal of Smart and Nano Materials |
| spelling | doaj.art-e9c68021e442469bae3ec9322970fbdb2023-02-09T14:43:58ZengTaylor & Francis GroupInternational Journal of Smart and Nano Materials1947-54111947-542X2022-04-0113229331410.1080/19475411.2022.2071352TiNiHf/SiO2/Si shape memory film composites for bi-directional micro actuationSabrina M. Curtis0Marian Sielenkämper1Gowtham Arivanandhan2Duygu Dengiz3Zixiong Li4Justin Jetter5Lisa Hanke6Lars Bumke7Eckhard Quandt8Stephan Wulfinghoff9Manfred Kohl10Institute for Materials Science, Kiel University (CAU), Kiel, GermanyInstitute for Materials Science, Kiel University (CAU), Kiel, GermanyInstitute of Microstructure Technology, Karlsruhe Institute of Technology (KIT), Karlsruhe, GermanyInstitute for Materials Science, Kiel University (CAU), Kiel, GermanyInstitute of Microstructure Technology, Karlsruhe Institute of Technology (KIT), Karlsruhe, GermanyInstitute for Materials Science, Kiel University (CAU), Kiel, GermanyInstitute for Materials Science, Kiel University (CAU), Kiel, GermanyInstitute for Materials Science, Kiel University (CAU), Kiel, GermanyInstitute for Materials Science, Kiel University (CAU), Kiel, GermanyInstitute for Materials Science, Kiel University (CAU), Kiel, GermanyInstitute of Microstructure Technology, Karlsruhe Institute of Technology (KIT), Karlsruhe, GermanyABSTRACTThe martensitic phase transformation in Ti40.4Ni48Hf11.6 shape memory alloys is leveraged for bi-directional actuation with TiNiHf/SiO2/Si composites. The shape memory properties of magnetron sputtered Ti40.4Ni48Hf11.6 films annealed at 635°C – 5 min are influenced by film thickness and the underlying substrate. Decreasing TiNiHf film thickness from 21 μm to 110 nm results in the reduction of all characteristic transformation temperatures until a critical thickness is reached. Particularly, Ti40.4Ni48Hf11.6 thin films as low as 220 nm show transformations above room temperature when deposited on SiO2 buffer layer, which is of great interest in nano-actuation. In comparison, 220 nm films on Si substrates are austenitic at room temperature, and thus not suitable for actuation. Thermal fatigue tests on TiNiHf/SiO2/Si bimorphs demonstrate better functional fatigue characteristics than freestanding films, with an average reduction of 15°C after 125 cycles, with temperature stabilization subsequently. Experimental bi-directional actuation results are promising in the development of bistable actuators within a PMMA/TiNiHf/Si trimorph composite, whereby the additional PMMA layer undergoes a glass transition at 105°C. With the aid of constitutive modeling, a route is elaborated on how bistable actuation can be achieved at micro- to nanoscales by showing favorable thickness combinations of PMMA/TiNiHf/Si composite.https://www.tandfonline.com/doi/10.1080/19475411.2022.2071352Bimorph microactuatorNiTiHfbistable actuatorshape memory alloythin films |
| spellingShingle | Sabrina M. Curtis Marian Sielenkämper Gowtham Arivanandhan Duygu Dengiz Zixiong Li Justin Jetter Lisa Hanke Lars Bumke Eckhard Quandt Stephan Wulfinghoff Manfred Kohl TiNiHf/SiO2/Si shape memory film composites for bi-directional micro actuation International Journal of Smart and Nano Materials Bimorph microactuator NiTiHf bistable actuator shape memory alloy thin films |
| title | TiNiHf/SiO2/Si shape memory film composites for bi-directional micro actuation |
| title_full | TiNiHf/SiO2/Si shape memory film composites for bi-directional micro actuation |
| title_fullStr | TiNiHf/SiO2/Si shape memory film composites for bi-directional micro actuation |
| title_full_unstemmed | TiNiHf/SiO2/Si shape memory film composites for bi-directional micro actuation |
| title_short | TiNiHf/SiO2/Si shape memory film composites for bi-directional micro actuation |
| title_sort | tinihf sio2 si shape memory film composites for bi directional micro actuation |
| topic | Bimorph microactuator NiTiHf bistable actuator shape memory alloy thin films |
| url | https://www.tandfonline.com/doi/10.1080/19475411.2022.2071352 |
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