Formation of Multiscale Pattern Structures by Combined Patterning of Nanotransfer Printing and Laser Micromachining

Formation of Multiscale Pattern Structures by Combined Patterning of Nanotransfer Printing and Laser Micromachining

Various lithography techniques have been widely used for the fabrication of next-generation device applications. Micro/nanoscale pattern structures formed by lithographic methods significantly improve the performance capabilities of the devices. Here, we introduce a novel method that combines the pa...

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Bibliographic Details
Main Authors: Tae Wan Park, Young Lim Kang, Eun Bin Kang, Seungmin Kim, Yu Na Kim, Woon Ik Park
Format: Article
Language:English
Published: MDPI AG 2023-08-01
Series:Nanomaterials
Subjects:
multiscale
nanostructure
nanotransfer printing
laser micromachining
Online Access:https://www.mdpi.com/2079-4991/13/16/2327

Internet

https://www.mdpi.com/2079-4991/13/16/2327

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