The Relationships of Microscopic Evolution to Resistivity Variation of a FIB-Deposited Platinum Interconnector

The Relationships of Microscopic Evolution to Resistivity Variation of a FIB-Deposited Platinum Interconnector

Depositing platinum (Pt) interconnectors during the sample preparation process via a focused ion beam (FIB) system is an inescapable procedure for in situ transmission electron microscopy (TEM) investigations. To achieve good electrical contact and avoid irreversible damage in practical samples, the...

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Bibliographic Details
Main Authors: Chaorong Zhong, Ruijuan Qi, Yonghui Zheng, Yan Cheng, Wenxiong Song, Rong Huang
Format: Article
Language:English
Published: MDPI AG 2020-06-01
Series:Micromachines
Subjects:
microscopic evolution
Pt interconnector
in situ heating and biasing
annealing treatment
Online Access:https://www.mdpi.com/2072-666X/11/6/588

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https://www.mdpi.com/2072-666X/11/6/588

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