Single-Wedge Lift-Out for Atom Probe Tomography Al/Ni Multilayers Specimen Preparation Based on Dual-Beam-FIB

Single-Wedge Lift-Out for Atom Probe Tomography Al/Ni Multilayers Specimen Preparation Based on Dual-Beam-FIB

Atomic probe tomography (APT) samples with Al/Ni multilayer structure were successfully prepared by using a focused ion beam (FIB), combining with a field emission scanning electron microscope, with a new single-wedge lift-out method and a reduced amorphous damage layer of Ga ions implantation. The...

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Bibliographic Details
Main Authors: Yi Qiao, Yalong Zhao, Zheng Zhang, Binbin Liu, Fusheng Li, Huan Tong, Jintong Wu, Zhanqi Zhou, Zongwei Xu, Yue Zhang
Format: Article
Language:English
Published: MDPI AG 2021-12-01
Series:Micromachines
Subjects:
atom probe tomography (APT)
single-wedge
lift-out
focused ion beam (FIB)
Al/Ni multilayers
Online Access:https://www.mdpi.com/2072-666X/13/1/35

Internet

https://www.mdpi.com/2072-666X/13/1/35

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