Single-Wedge Lift-Out for Atom Probe Tomography Al/Ni Multilayers Specimen Preparation Based on Dual-Beam-FIB
Atomic probe tomography (APT) samples with Al/Ni multilayer structure were successfully prepared by using a focused ion beam (FIB), combining with a field emission scanning electron microscope, with a new single-wedge lift-out method and a reduced amorphous damage layer of Ga ions implantation. The...
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| Format: | Article |
| Language: | English |
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MDPI AG
2021-12-01
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| Series: | Micromachines |
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| Online Access: | https://www.mdpi.com/2072-666X/13/1/35 |
| _version_ | 1797491926958604288 |
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| author | Yi Qiao Yalong Zhao Zheng Zhang Binbin Liu Fusheng Li Huan Tong Jintong Wu Zhanqi Zhou Zongwei Xu Yue Zhang |
| author_facet | Yi Qiao Yalong Zhao Zheng Zhang Binbin Liu Fusheng Li Huan Tong Jintong Wu Zhanqi Zhou Zongwei Xu Yue Zhang |
| author_sort | Yi Qiao |
| collection | DOAJ |
| description | Atomic probe tomography (APT) samples with Al/Ni multilayer structure were successfully prepared by using a focused ion beam (FIB), combining with a field emission scanning electron microscope, with a new single-wedge lift-out method and a reduced amorphous damage layer of Ga ions implantation. The optimum vertex angle and preparation parameters of APT sample were discussed. The double interdiffusion relationship of the multilayer films was successfully observed by the local electrode APT, which laid a foundation for further study of the interface composition and crystal structure of the two-phase composites. |
| first_indexed | 2024-03-10T00:56:14Z |
| format | Article |
| id | doaj.art-ea4cab07f57d4bedb31f7fbd632f6874 |
| institution | Directory Open Access Journal |
| issn | 2072-666X |
| language | English |
| last_indexed | 2024-03-10T00:56:14Z |
| publishDate | 2021-12-01 |
| publisher | MDPI AG |
| record_format | Article |
| series | Micromachines |
| spelling | doaj.art-ea4cab07f57d4bedb31f7fbd632f68742023-11-23T14:43:52ZengMDPI AGMicromachines2072-666X2021-12-011313510.3390/mi13010035Single-Wedge Lift-Out for Atom Probe Tomography Al/Ni Multilayers Specimen Preparation Based on Dual-Beam-FIBYi Qiao0Yalong Zhao1Zheng Zhang2Binbin Liu3Fusheng Li4Huan Tong5Jintong Wu6Zhanqi Zhou7Zongwei Xu8Yue Zhang9State Key Laboratory for Advanced Metals and Materials, University of Science and Technology, Beijing 100083, ChinaState Key Laboratory for Advanced Metals and Materials, University of Science and Technology, Beijing 100083, ChinaSchool of Materials Science and Engineering, University of Science and Technology, Beijing 100083, ChinaState Key Laboratory for Advanced Metals and Materials, University of Science and Technology, Beijing 100083, ChinaState Key Laboratory for Advanced Metals and Materials, University of Science and Technology, Beijing 100083, ChinaState Key Laboratory for Advanced Metals and Materials, University of Science and Technology, Beijing 100083, ChinaState Key Laboratory of Precision Measuring Technology & Instruments, Laboratory of Micro/Nano Manufacturing Technology, Tianjin University, Tianjin 300072, ChinaState Key Laboratory of Precision Measuring Technology & Instruments, Laboratory of Micro/Nano Manufacturing Technology, Tianjin University, Tianjin 300072, ChinaState Key Laboratory of Precision Measuring Technology & Instruments, Laboratory of Micro/Nano Manufacturing Technology, Tianjin University, Tianjin 300072, ChinaState Key Laboratory for Advanced Metals and Materials, University of Science and Technology, Beijing 100083, ChinaAtomic probe tomography (APT) samples with Al/Ni multilayer structure were successfully prepared by using a focused ion beam (FIB), combining with a field emission scanning electron microscope, with a new single-wedge lift-out method and a reduced amorphous damage layer of Ga ions implantation. The optimum vertex angle and preparation parameters of APT sample were discussed. The double interdiffusion relationship of the multilayer films was successfully observed by the local electrode APT, which laid a foundation for further study of the interface composition and crystal structure of the two-phase composites.https://www.mdpi.com/2072-666X/13/1/35atom probe tomography (APT)single-wedgelift-outfocused ion beam (FIB)Al/Ni multilayers |
| spellingShingle | Yi Qiao Yalong Zhao Zheng Zhang Binbin Liu Fusheng Li Huan Tong Jintong Wu Zhanqi Zhou Zongwei Xu Yue Zhang Single-Wedge Lift-Out for Atom Probe Tomography Al/Ni Multilayers Specimen Preparation Based on Dual-Beam-FIB Micromachines atom probe tomography (APT) single-wedge lift-out focused ion beam (FIB) Al/Ni multilayers |
| title | Single-Wedge Lift-Out for Atom Probe Tomography Al/Ni Multilayers Specimen Preparation Based on Dual-Beam-FIB |
| title_full | Single-Wedge Lift-Out for Atom Probe Tomography Al/Ni Multilayers Specimen Preparation Based on Dual-Beam-FIB |
| title_fullStr | Single-Wedge Lift-Out for Atom Probe Tomography Al/Ni Multilayers Specimen Preparation Based on Dual-Beam-FIB |
| title_full_unstemmed | Single-Wedge Lift-Out for Atom Probe Tomography Al/Ni Multilayers Specimen Preparation Based on Dual-Beam-FIB |
| title_short | Single-Wedge Lift-Out for Atom Probe Tomography Al/Ni Multilayers Specimen Preparation Based on Dual-Beam-FIB |
| title_sort | single wedge lift out for atom probe tomography al ni multilayers specimen preparation based on dual beam fib |
| topic | atom probe tomography (APT) single-wedge lift-out focused ion beam (FIB) Al/Ni multilayers |
| url | https://www.mdpi.com/2072-666X/13/1/35 |
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