Dynamic surface control of bellows-driven ultra-precision positioning system based on nonlinear extended state observer
This thesis report on a novel bellows-driven, two-dimensional, pneumatic ultra-precise positioning system. A dynamic surface control (DSC) method based on nonlinear extended state observer (NESO) is proposed to solve the control problem of nonlinear pneumatic servo positioning system. The bellows ar...
| Main Authors: | , , |
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| Format: | Article |
| Language: | English |
| Published: |
The Japan Society of Mechanical Engineers
2019-12-01
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| Series: | Journal of Advanced Mechanical Design, Systems, and Manufacturing |
| Subjects: | |
| Online Access: | https://www.jstage.jst.go.jp/article/jamdsm/13/4/13_2019jamdsm0086/_pdf/-char/en |