Differential Confocal Optical Probes with Optimized Detection Efficiency and Pearson Correlation Coefficient Strategy Based on the Peak-Clustering Algorithm

Quantifying free-form surfaces using differential confocal microscopy can be challenging, as it requires balancing accuracy and efficiency. When the axial scanning mechanism involves sloshing and the measured surface has a finite slope, traditional linear fitting can introduce significant errors. Th...

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Bibliographic Details
Main Authors: Zhiyi Wang, Tingyu Wang, Yongqiang Yang, Xiaotao Mi, Jianli Wang
Format: Article
Language:English
Published: MDPI AG 2023-05-01
Series:Micromachines
Subjects:
Online Access:https://www.mdpi.com/2072-666X/14/6/1163