Differential Confocal Optical Probes with Optimized Detection Efficiency and Pearson Correlation Coefficient Strategy Based on the Peak-Clustering Algorithm
Quantifying free-form surfaces using differential confocal microscopy can be challenging, as it requires balancing accuracy and efficiency. When the axial scanning mechanism involves sloshing and the measured surface has a finite slope, traditional linear fitting can introduce significant errors. Th...
Main Authors: | , , , , |
---|---|
Format: | Article |
Language: | English |
Published: |
MDPI AG
2023-05-01
|
Series: | Micromachines |
Subjects: | |
Online Access: | https://www.mdpi.com/2072-666X/14/6/1163 |