Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure

Performance of an Electrothermal MEMS Cantilever Resonator with Fano-Resonance Annoyance under Cigarette Smoke Exposure

An electrothermal piezoresistive cantilever (EPC) sensor is a low-cost MEMS resonance sensor that provides self-actuating and self-sensing capabilities. In the platform, which is of MEMS-cantilever shape, the EPC sensor offers several advantages in terms of physical, chemical, and biological sensing...

Full description

Bibliographic Details
Main Authors: Andi Setiono, Michael Fahrbach, Alexander Deutschinger, Ernest J. Fantner, Christian H. Schwalb, Iqbal Syamsu, Hutomo Suryo Wasisto, Erwin Peiner
Format: Article
Language:English
Published: MDPI AG 2021-06-01
Series:Sensors
Subjects:
electrothermal piezoresistive cantilever sensors
parasitic feedthrough subtraction
particle mass concentration measurement
cigarette smoke exposure
Online Access:https://www.mdpi.com/1424-8220/21/12/4088

Internet

https://www.mdpi.com/1424-8220/21/12/4088

Similar Items